A resonant circuit realization using a 3D inductor in combination with thin film varactor technology

A resonant circuit combining a 3D inductor with the barium strontium titanate thin film varactor, is presented in this work. The filter was fabricated using a 3D inductor fabrication process. The modeling of the filter was examined using the Advanced Design System (ADS). The measurement results showed that the resonant frequencies were around 10 GHz and correlated to different number of turns of 3D inductor. The inductances extracted from the equivalent circuit varied from 0.28 nH to 0.37 nH.