Mikroreaktorfertigung mittels Funkenerosion : Funkenerosives Strukturierungsverfahren für mikrofluidische Systeme

During its over 40 years old history, EDM processing has been dramatically improved to become a high precise and reliable fabrication method e.g. for tool-making industry. The recent technological advances as well as the development of new machine facilities have also placed EDM technologies among microfabrication processes. This is demonstrated by the use of EDM-grinding to fabricate microreaction systems for chemical industry.