论文信息 - Cleaning and passivation of the Si(100) surface by low temperature remote hydrogen plasma treatment for Si epitaxy - 字舞流文

Cleaning and passivation of the Si(100) surface by low temperature remote hydrogen plasma treatment for Si epitaxy

H. Marcus | C. Magee | B. Anthony | T. Hsu | R. Qian | A. Tasch | J. Irby | S. Lin | S. Banerjee | S. Lin | S. Lin