Magnetic induction and plasma impedance in a cylindrical inductive discharge

An inductive radio frequency discharge in the cylindrical configuration is modelled as a transformer with the inductive coil taken as the primary circuit and the plasma as the secondary circuit. The mutual inductance between the primary and secondary circuit, the self-inductance of the plasma and the impedance of the plasma are determined theoretically and related to the properties of the plasma evaluated using a global (volume-averaged) discharge model for argon plasma. The azimuthal electric field and the axial magnetic field profile within an inductive discharge in the cylindrical configuration are determined assuming a parabolic electron density profile.

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