Fabrication of large area nanostructured magnets by interferometric lithography

Patterned arrays of magnetic elements may be useful as media for high density magnetic storage applications. Interferometric lithography has been used to fabricate arrays of cobalt and nickel pillars with periods of 200 nm over areas of 5 cm/spl times/5 cm using a UV laser. This provides an economical and rapid method for manufacturing particle arrays.

[1]  Mohamad Towfik Krounbi,et al.  Beyond discrete tracks: Other aspects of patterned media , 1991 .

[2]  E. Wassermann,et al.  Preparation and characterization of large scale periodic magnetic nanostructures (abstract) , 1997 .

[3]  A. Scherer,et al.  Fabrication of Ultrasmall Magnets by Electroplating , 1995 .

[4]  P. J. Bedrossian,et al.  Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography , 1996 .

[5]  Heinz Schmid,et al.  Hysteresis in lithographic arrays of permalloy particles: Experiment and theory (invited) , 1991 .

[6]  Mark L. Schattenburg,et al.  Fabrication of high-energy x-ray transmission gratings for the Advanced X-ray Astrophysics Facility (AXAF) , 1994, Optics & Photonics.

[7]  Stephen Y. Chou,et al.  Nanolithographically defined magnetic structures and quantum magnetic disk (invited) , 1996 .

[8]  Michael D. Perry,et al.  Use of interference lithography to pattern arrays of submicron resist structures for field emission flat panel displays , 1997 .

[9]  R. Pease,et al.  Patterned media: a viable route to 50 Gbit/in/sup 2/ and up for magnetic recording? , 1997 .

[10]  Mark L. Schattenburg,et al.  Optically matched trilevel resist process for nanostructure fabrication , 1995 .

[11]  Paul B. Fischer,et al.  Single‐domain magnetic pillar array of 35 nm diameter and 65 Gbits/in.2 density for ultrahigh density quantum magnetic storage , 1994 .

[12]  J. Ansermet,et al.  ARRAYS OF MULTILAYERED NANOWIRES (INVITED) , 1996 .

[13]  Robert C. Barrett,et al.  High-density data storage using proximal probe techniques , 1995, IBM J. Res. Dev..

[14]  Michael D. Perry,et al.  Methods for fabricating arrays of holes using interference lithography , 1997 .

[15]  Mark L. Schattenburg,et al.  Large‐area achromatic interferometric lithography for 100 nm period gratings and grids , 1996 .

[16]  S. Chou,et al.  Study of nanoscale magnetic structures fabricated using electron‐beam lithography and quantum magnetic disk , 1994 .

[17]  S. Chou,et al.  Fabrication of single‐domain magnetic pillar array of 35 nm diameter and 65 Gbits/in.2 density , 1994 .

[18]  R. Pease,et al.  Magnetic force microscopy of single‐domain single‐crystal iron particles with uniaxial surface anisotropy , 1996 .