AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss

A CMOS compatible AlN/SiO2/Si3N4/Si(100) surface acoustic wave (SAW) device has been fabricated and will be compared with standard AlN/SiO2-based devices. The presented filter demonstrates high potential for CMOS integrated high-frequency SAW devices. The filter insertion loss could be improved to -12.8 dB. The device exhibits high crosstalk suppression of -50 dB on a standard Si-substrate (10 Ωcm). X-ray diffraction, (scanning) transmission electron microscopy, and energy dispersive X-ray spectroscopy studies correlate the signal quality with c -axis orientation of aluminum nitride films on interdigitated transducer finger electrodes. Finite-element method simulations are in good agreement with the electric measurements and show typical Rayleigh particle displacement.

[1]  S. A. Dobershtein,et al.  SAW ring filters with insertion loss of 1 dB , 1997 .

[2]  C. Bulutay,et al.  Theoretical study of the insulating oxides and nitrides: SiO2, GeO2, Al2O3, Si3N4, and Ge3N4 , 2006, cond-mat/0610176.

[3]  P. Kirsch,et al.  5GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography , 2006 .

[4]  H. H. Caicedo,et al.  Determination of Physical Response in (Mo/AlN) SAW Devices , 2013 .

[5]  Anis Nurashikin Nordin,et al.  Acoustic wave based MEMS devices for biosensing applications. , 2012, Biosensors & bioelectronics.

[6]  D. Wolansky,et al.  Development of CMOS integrated AlN based SAW-Filter and the role of Si substrate resistivity , 2012, 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG).

[7]  Christian Wenger,et al.  Monolithic integrated SAW filter based on AlN for high-frequency applications , 2013 .

[8]  Kak Namkoong,et al.  Surface acoustic wave immunosensor for real-time detection of hepatitis B surface antibodies in whole blood samples. , 2009, Biosensors & bioelectronics.

[9]  M. Dragoman,et al.  AlN SAW structures for GHz applications , 2008, 2008 Asia-Pacific Microwave Conference.

[10]  George Konstantinidis,et al.  AIN on silicon based surface acoustic wave resonators operating at 5 GHz , 2009 .

[11]  Anthony J. Walton,et al.  Aluminium Nitride thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications , 2010 .

[12]  P. Rey,et al.  A novel structure of AlN/SiO2/Si, AlN/Si SAW filter , 2008, 2008 IEEE International Frequency Control Symposium.

[13]  S. Fujii.  High‐frequency surface acoustic wave filter based on diamond thin film , 2011 .

[14]  Oliver Brandt,et al.  Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates , 2002 .

[15]  K. Hashimoto,et al.  Full-wave analysis of piezoelectric boundary waves propagating along metallic grating sandwiched in between two semi-infinite layers , 2009, 2008 IEEE International Frequency Control Symposium.

[16]  M. Aguilar,et al.  Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films , 2003 .

[17]  Christian Wenger,et al.  FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO₂/Si(100). , 2014, Ultrasonics.

[18]  Fernando Calle,et al.  High precision pressure sensors based on SAW devices in the GHz range , 2013 .

[19]  L. Vergara,et al.  SAW characteristics of AlN films sputtered on silicon substrates. , 2004, Ultrasonics.

[20]  Fernando Calle,et al.  Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators , 2012 .

[21]  F. Calle,et al.  Super-High-Frequency SAW Resonators on AlN/Diamond , 2012, IEEE Electron Device Letters.

[22]  D. Wolansky,et al.  Crosstalk suppression of CMOS compatible AlN based SAW devices on low resistive Si(100) , 2014 .

[23]  M. Vaněček,et al.  ZnO/AlN/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient , 2005 .

[24]  M. Shur,et al.  Surface acoustic wave velocity in single-crystal AlN substrates , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[25]  Gang Xu,et al.  Pressure and Temperature Microsensor Based on Surface Acoustic Wave in TPMS , 2010 .