Scattering Loss Estimation Using 2-D Fourier Analysis and Modeling of Sidewall Roughness on Optical Waveguides

We report an accurate scattering loss 3-D modeling technique of sidewall roughness of optical SOI waveguides based on Fourier and finite-difference time domain (FDTD) analysis methods. The Fourier analysis method is based on the image recovery technique used in magnetic resonant imaging. Losses for waveguides with isotropic and anisotropic roughness are calculated for wavelengths ranging from 1550 to 3800 nm and compared with reported results in literature. Our simulations show excellent agreement with published experimental results and provide an accurate prediction of roughness-induced loss of 3-D arbitrary shaped optical waveguides.

[1]  T. Barwicz,et al.  Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides , 2005, Journal of Lightwave Technology.

[2]  Graham T. Reed,et al.  Silicon Photonics: The State of the Art , 2008 .

[3]  F. Payne,et al.  A theoretical analysis of scattering loss from planar optical waveguides , 1994 .

[4]  Y. Vlasov,et al.  Losses in single-mode silicon-on-insulator strip waveguides and bends. , 2004, Optics express.

[5]  W Freude,et al.  Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition. , 2011, Optics express.

[6]  A. Mitchell,et al.  Width Dependence of Inherent TM-Mode Lateral Leakage Loss in Silicon-On-Insulator Ridge Waveguides , 2007, IEEE Photonics Technology Letters.

[7]  Dietrich Marcuse,et al.  Mode conversion caused by surface imperfections of a dielectric slab waveguide , 1969 .

[8]  C. Koos,et al.  Radiation Modes and Roughness Loss in High Index-Contrast Waveguides , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[9]  P. Waldron,et al.  Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides , 2009, Journal of Lightwave Technology.

[10]  D. Van Thourhout,et al.  Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography , 2004, IEEE Photonics Technology Letters.

[11]  H. Haus,et al.  Radiation loss in dielectric waveguide structures by the volume current method , 1983 .

[12]  Ching-Fuh Lin,et al.  Use of SiO2 nanoparticles as etch mask to generate Si nanorods by reactive ion etch , 2006 .

[13]  M. Soljačić,et al.  Roughness losses and volume-current methods in photonic-crystal waveguides , 2005 .

[14]  F. Payne,et al.  Radiation loss from planar waveguides with random wall imperfections , 1990 .

[15]  L C Kimerling,et al.  Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction. , 2001, Optics letters.

[16]  S. Spector,et al.  Silicon waveguide sidewall smoothing by wet chemical oxidation , 2005, Journal of Lightwave Technology.

[17]  Carolyn Kaut,et al.  MRI in Practice , 1993 .

[18]  Milos Nedeljkovic,et al.  Low loss silicon waveguides for the mid-infrared. , 2011, Optics express.

[19]  K J Stout,et al.  Two-Dimensional Fast Fourier Transform and Power Spectrum for Surface Roughness in three Dimensions , 1995 .

[20]  R. Luebbers,et al.  The Finite Difference Time Domain Method for Electromagnetics , 1993 .

[21]  L. Kimerling,et al.  Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model , 2000 .