Piezoelectric properties of polycrystalline AlN thin films for MEMS application
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Oliver Ambacher | Volker Cimalla | D. Dontsov | Henry Romanus | Katja Tonisch | O. Ambacher | V. Cimalla | D. Dontsov | H. Romanus | Ch. Foerster | K. Tonisch | C. Foerster
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