论文信息 - High-K thin films as dielectric transducers for flexural M/NEMS resonators - 字舞流文

High-K thin films as dielectric transducers for flexural M/NEMS resonators

B. Legrand | O. Thomas | T. Leichlé | L. Nicu | L. Mazenq | Cécile Fuinel | K. Daffe | A. Laborde