论文信息 - Room temperature synthesis of SiO2 thin films by ion beam induced and plasma enhanced CVD - 字舞流文

Room temperature synthesis of SiO2 thin films by ion beam induced and plasma enhanced CVD

T. Girardeau | F. Yubero | J. P. Espinós | J. Rivière | J. Allain | J. Cotrino | Á. Barranco | A. González‐Elipe | J. Benı́tez