ZnO hybrid microcavities grown by plasma assisted molecular beam epitaxy

Strong coupling between the exciton and cavity modes were demonstrated in a bulk ZnO-based hybrid microcavity The hybrid microcavity consisted of a λ-thick bulk ZnO cavity layer sandwiched between a 29 pair Al0.5Ga0.5N/GaN bottom distributed Bragg reflector (DBR) and an 8 pair SiO2/Si3N4 top DBR grown by molecular beam epitaxy, metalorganic chemical vapor deposition, and ultra high vacuum plasma-enhanced chemical vapor deposition, respectively. All layer interfaces were sharp and optical reflectivity measurements were performed to characterize the DBRs. The anti-crossing behavior in the polarton dispersion, which indicates the system is in the strong coupling regime was observed in angle-resolved photoluminescence measurements at room temperature, and a vacuum Rabi splitting of ~50 meV in the ZnO-based hybrid microcavity was obtained.

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