In order to measure inner surface roughness of small holes nondestructively, a new fiber optic sensor is researched and developed. Firstly, a new model for surface roughness measurement is proposed, which is based on intensity-modulated fiber optic sensors and scattering modeling of rough surfaces. Secondly, a fiber optical measurement system is designed and set up. Under the help of new techniques, the fiber optic sensor can be miniaturized. Furthermore, the use of micro prism makes the light turn 90 degree, so the inner side surface roughness of small holes can be measured. Thirdly, the fiber optic sensor is gauged by standard surface roughness specimens, and a series of measurement experiments have been done. The measurement results are compared with those obtained by TR220 Surface Roughness Instrument and Form Talysurf Laser 635, and validity of the developed fiber optic sensor is verified. Finally, precision and influence factors of the fiber optic sensor are analyzed.
[1]
X. Shan,et al.
A novel self-sensitive SFM for nondestructive measurement of tiny vertical surfaces with restricted access
,
2003,
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..
[2]
Bo You,et al.
Research on automatic measuring instrument for deep hole
,
2003,
SPIE Optics East.
[3]
Wang Jianlin.
Optoelectronic inspection of in-pipe surfaces
,
2008
.
[4]
Masaru Watanabe,et al.
Optical inspection system for the inner surface of a pipe using detection of circular images projected by a laser source
,
1994
.
[5]
K. Yamazaki,et al.
A Reflective Fiber Optic Sensor for Surface Roughness In-Process Measurement
,
2002
.
[6]
Hideki Aoyama,et al.
Fiber optic surface topography measurement sensor and its design study
,
2000
.