Quadrature phase-shift error analysis using a homodyne laser interferometer.

The influence of quadrature phase shift on the measured displacement error was experimentally investigated using a two-detector polarizing homodyne laser interferometer with a quadrature detection system. Common nonlinearities, including the phase-shift error, were determined and effectively corrected by a robust data-processing algorithm. The measured phase-shift error perfectly agrees with the theoretically determined phase-shift error region. This error is systematic, periodic and severely asymmetrical around the nominal displacement value. The main results presented in this paper can also be used to assess and correct the detector errors of other interferometric and non-interferometric displacement-measuring devices based on phase-quadrature detection.

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