论文信息 - On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide - 字舞流文

On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide

E. Janzén | I. Ivanov | O. Kordina | H. Pedersen | P. Sukkaew | Ö. Danielsson | Milan Yazdanfar | E. Janzén