High-g Accelerometer in MEMS for Penetrator Weapon

The acceleration of penetrator weapon when it irrupts into ground firm substance is twenty thousand times to hundreds thousand of times of gravity acceleration, the acceleration sensor that was required not only oppugns work circumstance but also identifies the process of concussion and irruption. High-g accelerometer in MEMS for USA penetrator weapon pertains to capacitance sensor, its operational principle is that 2 capacitances with same electric parameter are used, one used as test, and another used as reference, and that the change of acceleration value tested is transformed in the change of capacitance quantity. High-g accelerometer consists of structure unit and the signal processing circuit. The tested results show that 2 parts of structure unit and the signal processing circuit should be integrated and the mechanical static damp is optimized, the encapsulation is researched.