Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors

The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology.

[1]  G. Carman,et al.  Ultra-low power electrically reconfigurable magnetoelectric microwave devices , 2012 .

[2]  Christian J. Long,et al.  Energy harvesting properties of all-thin-film multiferroic cantilevers , 2011 .

[3]  Jungho Ryu,et al.  Piezoelectric and Magnetoelectric Thick Films for Fabricating Power Sources in Wireless Sensor Nodes , 2009, Sensors.

[4]  S. Dong,et al.  Vortex magnetic field sensor based on ring-type magnetoelectric laminate , 2004 .

[5]  M. S. Keshner.  1/f noise , 1982, Proceedings of the IEEE.

[6]  Apurva Mehta,et al.  Giant magnetostriction in annealed Co(1-x)Fe(x) thin-films. , 2011, Nature communications.

[7]  D. Z. Zhang,et al.  Magnetic core loss of ultrahigh strength FeCo alloys , 2003 .

[8]  Chunli Zhang,et al.  Harvesting magnetic energy using extensional vibration of laminated magnetoelectric plates , 2009 .

[9]  T. Gabrielson.  Mechanical-thermal noise in micromachined acoustic and vibration sensors , 1993 .

[11]  B. Wagner,et al.  MEMS magnetic field sensor based on magnetoelectric composites , 2012 .

[12]  Gregory A. Fischer,et al.  Minimizing 1/f noise in magnetic sensors using a microelectromechanical system flux concentrator , 2002 .

[13]  David Berry,et al.  An Extremely Low Equivalent Magnetic Noise Magnetoelectric Sensor , 2011, Advanced materials.

[14]  C. Brosseau,et al.  Magnetic field dependence of the effective permittivity in BaTiO3∕Ni nanocomposites observed via microwave spectroscopy , 2008 .

[15]  A. Rushforth,et al.  Electrical control of magnetic reversal processes in magnetostrictive structures , 2013 .

[16]  M. Rinaldi,et al.  Self-Biased 215MHz Magnetoelectric NEMS Resonator for Ultra-Sensitive DC Magnetic Field Detection , 2013, Scientific Reports.

[17]  Christophe Dolabdjian,et al.  Stress reconfigurable tunable magnetoelectric resonators as magnetic sensors , 2013 .

[18]  Ping Li,et al.  A magnetoelectric energy harvester and management circuit for wireless sensor network , 2010 .