论文信息 - Determination of thickness and optical constants of amorphous silicon films from transmittance data

Determination of thickness and optical constants of amorphous silicon films from transmittance data

This work presents the application of a recently developed numerical method to determine the thickness and the optical constants of thin films using experimental transmittance data only. This method may be applied to films not displaying a fringe pattern and is shown to work for a-Si:H (hydrogenated amorphous silicon) layers as thin as 100 nm. The performance and limitations of the method are discussed on the basis of experiments performed on a series of six a-Si:H samples grown under identical conditions, but with thickness varying from 98 nm to 1.2 μm.

E. Birgin | M. Mulato | I. Chambouleyron | J. M. Martínez

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