HfO2-based RRAM for Embedded Nonvolatile Memory: From Materials Science to Integrated 1T1R RRAM Arrays

Thomas Bertaud , Christian Walczyk , Damian Walczyk , Malgorzata Sowinska , Dirk Wolansky , Bernd Tillack , Gunter Schoof , Christian Wenger , Sebastian Thiess , and Thomas Schroeder 1,4 1 IHP, Im Technologiepark 25, 15236 Frankfurt Oder, Germany 2 Deutsches Elektronen-Synchrotron DESY, Notkestrasse 85, 22607 Hamburg, Germany 3 Technische Universitat Berlin, 10587 Berlin, Germany 4 Brandenburgische Technische Universitat, KonradZuse-Strasse 1, 03046 Cottbus, Germany