Lifetime modelling for microsystems integration: from nano to systems

Due to the rapid development of IC technology the traditional packaging concepts are making a transition into more complex system integration techniques in order to enable the constantly increasing demand for more functionality, performance, miniaturisation and lower cost. These new packaging concepts (as e.g. system in package, 3D integration, MEMS-devices) will have to combine smaller structures and layers made of new materials with even higher reliability. As these structures will more and more display nano-features, a coupled experimental and simulative approach has to account for this development to assure design for reliability in the future. A necessary “nano-reliability” approach as a scientific discipline has to encompass research on the properties and failure behaviour of materials and material interfaces under explicit consideration of their micro- and nano-structure and the effects hereby induced. It uses micro- and nano-analytical methods in simulation and experiment to consistently describe failure mechanisms over these length scales for more accurate and physically motivated lifetime prediction models. This paper deals with the thermo-mechanical reliability of microelectronic components and systems and methods to analyse and predict it. Various methods are presented to enable lifetime prediction on system, component and material level, the latter promoting the field of nano-reliability for future packaging challenges in advanced electronics system integration.

[1]  Kerstin Weinberg,et al.  A strategy for damage assessment of thermally stressed copper vias in microelectronic printed circuit boards , 2008, Microelectron. Reliab..

[2]  H. Reichl,et al.  High aspect ratio TSV copper filling with different seed layers , 2008, 2008 58th Electronic Components and Technology Conference.

[3]  Suresh K. Sitaraman,et al.  Die cracking and reliable die design for flip-chip assemblies , 1999, ECTC 1999.

[4]  R. Schacht,et al.  Material characterization and non-destructive failure analysis by transient pulse generation and IR-thermography , 2008, 2008 14th International Workshop on Thermal Inveatigation of ICs and Systems.

[5]  H. Reichl,et al.  Failure modeling of ACA-glued flip-chip on flex assemblies , 2008 .

[6]  H. Reichl,et al.  Nondestructive Failure Analysis and Simulation of Encapsulated 0402 Multilayer Ceramic Chip Capacitors Under Thermal and Mechanical Loading , 2009 .

[7]  Peter Ramm,et al.  Wafer‐Level 3D System Integration , 2008 .

[8]  J. Bauer,et al.  Structure property correlation of epoxy resins under the influence of moisture and temperature; and comparison of diffusion coefficient with MD-simulations , 2008, 2008 2nd Electronics System-Integration Technology Conference.

[9]  Jicheng Yang,et al.  RF PA module substrate via reliability , 2003, 53rd Electronic Components and Technology Conference, 2003. Proceedings..

[10]  B. Michel,et al.  Mechanism of Moisture Diffusion, Hygroscopic Swelling, and Adhesion Degradation in Epoxy Molding Compounds , 2010 .

[11]  Herbert Reichl,et al.  Thermo-Mechanical Reliability of 3D-integrated Microstructures in Stacked Silicon , 2006 .

[12]  B. Wunderle,et al.  Interface Characterization and Failure Modeling for Semiconductor Packages , 2008, 2008 10th Electronics Packaging Technology Conference.

[13]  H. Reichl,et al.  Application of interfacial fracture mechanics approach for obtaining design rules for flip chip interconnections , 2008 .

[14]  B. Wunderle,et al.  Modeling cure shrinkage and viscoelasticity to enhance the numerical methods for predicting delamination in semiconductor packages , 2009, EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.

[15]  D. Frear The Mechanics of Solder Alloy Interconnects , 1993 .

[16]  H. Reichl,et al.  Improved Reliability of Leadfree Flip Chip Assemblies Using Direct Underfilling by Transfer Molding , 2006, 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium.

[17]  A. Birolini Quality and reliability of technical systems , 1994 .

[18]  H. Walter,et al.  Constitutive behaviour of lead-free solders vs. lead-containing solders-experiments on bulk specimens and flip-chip joints , 2001, 2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220).

[19]  J. Bauer,et al.  Molecular dynamics simulation and mechanical characterisation for the establishment of structure-property correlations for epoxy resins in microelectronics packaging applications , 2009, EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.

[20]  R. Schacht,et al.  Lifetime Prediction of SnPb and SnAgCu Solder Joints of Chips on Copper Substrate Based on Crack Propagation FE-Analysis , 2006, EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems.

[21]  S. Manson,et al.  Thermal Stress and Low-Cycle Fatigue , 2020, Encyclopedia of Continuum Mechanics.

[22]  Bharat Bhushan,et al.  Applied scanning probe methods , 2006 .

[23]  B. Michel,et al.  Microcrack evaluation for electronics components by AFM nanoDAC deformation measurement , 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

[24]  Patrick McCluskey,et al.  Wire Flexure Fatigue Model for Asymmetric Bond Height , 2003 .

[25]  Herbert Reichl,et al.  Using life-cycle information for reliability assessment of electronic assemblies , 2002, IEEE International Integrated Reliability Workshop Final Report, 2002..

[26]  K.M.B. Jansen,et al.  Cure Shrinkage and Bulk Modulus Determination for Moulding Compounds , 2006, 2006 1st Electronic Systemintegration Technology Conference.

[27]  Bernhard Wunderle,et al.  Induced delamination of silicon-molding compound interfaces , 2009, EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.

[28]  Y. Haddad Viscoelasticity of Engineering Materials , 1994 .

[29]  Herbert Reichl,et al.  Parametric FE-approach to flip-chip reliability under various loading conditions , 2004, Microelectron. Reliab..

[30]  H. Reichl,et al.  Through silicon via technology — processes and reliability for wafer-level 3D system integration , 2008, 2008 58th Electronic Components and Technology Conference.

[31]  Liu Johan,et al.  Reliability aspects of electronics packaging technology using anisotropic conductive adhesives , 2007 .

[32]  H. Reichl,et al.  Fatigue life models for SnAgCu and SnPb solder joints evaluated by experiments and simulation , 2003, 53rd Electronic Components and Technology Conference, 2003. Proceedings..

[33]  Jianmin Qu,et al.  Interfacial Versus Cohesive Failure on Polymer-Metal Interfaces in Electronic Packaging—Effects of Interface Roughness , 2002 .

[34]  Xuejun Fan,et al.  Mechanics of moisture for polymers: Fundamental concepts and model study , 2008, EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems.

[35]  Joan Ramon Morante,et al.  FIB based measurements for material characterization on MEMS structures , 2005, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[36]  H. Reichl,et al.  Rapid Interface Reliability Testing of Flip Chip Encapsulants , 2007, 2007 Proceedings 57th Electronic Components and Technology Conference.

[37]  H. Conrad,et al.  Thermomechanical Fatigue of 63Sn-37Pb Solder Joints , 1993 .

[38]  O. Wittler,et al.  Encapsulation of systems in package - process characterization and optimization , 2008, 2008 2nd Electronics System-Integration Technology Conference.

[39]  Bernd Michel,et al.  Reliability of SnPb and Pb-free flip-chips under different test conditions , 2007, 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the.

[40]  Ronald Krueger,et al.  The Virtual Crack Closure Technique : History , Approach and Applications , 2002 .

[41]  A.A.O. Tay,et al.  Application of modified virtual crack closure method on delamination analysis in a plastic IC package during lead-free solder reflow , 2005, 2005 7th Electronic Packaging Technology Conference.

[42]  Bernd Michel,et al.  Progress in reliability research in the micro and nano region , 2006, Microelectron. Reliab..

[43]  Matthew Ming Fai Yuen,et al.  Investigation of moisture diffusion in electronic packages by molecular dynamics simulation , 2006 .

[44]  Olaf Wittler,et al.  Bruchmechanische Analyse von viskoelastischen Werkstoffen in elektronischen Bauteilen , 2004 .

[45]  Anette M. Karlsson,et al.  Obtaining mode mixity for a bimaterial interface crack using the virtual crack closure technique , 2006 .

[46]  Xuejun Fan,et al.  Mechanics of Microelectronics , 2006 .

[47]  X. J. Zhao,et al.  Some Characteristics of Anisotropic Conductive and Non-conductive Adhesive Flip Chip on Flex Interconnections , 2003 .

[48]  M. A. Haque,et al.  A review of MEMS-based microscale and nanoscale tensile and bending testing , 2003 .

[49]  Suresh K. Sitaraman,et al.  Accelerated Thermal Cycling Guidelines for Electronic Packages in Military Avionics Thermal Environment , 2004 .

[50]  Jing-en Luan,et al.  Characterization and modeling of hygroscopic swelling and its impact on failures of a flip chip package with no-flow underfill , 2005, 2005 7th Electronic Packaging Technology Conference.

[51]  Gerhard Wachutka,et al.  Thermo-Mechanical Simulation of Wire Bonding Joints in Power Modules , 1999 .

[52]  Rainer Dudek,et al.  FE-simulation for polymeric packaging materials , 1997 .

[53]  H. Reichl,et al.  Thermo-mechanical reliability of power flip-chip cooling concepts , 2004, 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No.04CH37546).

[54]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[55]  V. Gupta,et al.  Experimental evaluations of the strength of silicon die by 3-point-bend versus Ball-on-Ring tests , 2009, 2008 11th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems.

[56]  B. Wunderle,et al.  Mechanical characterisation of thin metal layers by modelling of the nanoindentation experiment , 2008, 2008 2nd Electronics System-Integration Technology Conference.

[57]  Herbert Reichl,et al.  Reliability of flip chip and chip size packages , 2000 .

[58]  Ahmer Syed,et al.  Predicting solder joint reliability for thermal, power, and bend cycle within 25% accuracy , 2001, 2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220).

[59]  Patrick T. Mather,et al.  Viscoelastic Properties of an Epoxy Resin during Cure , 2001 .

[60]  T. Matsunaga,et al.  Thermal Fatigue Life Evaluation of Aluminum Wire Bonds , 2006, 2006 1st Electronic Systemintegration Technology Conference.

[61]  H. Rothuizen,et al.  Interlayer cooling potential in vertically integrated packages , 2008 .

[62]  Yong Liu,et al.  Trends of Power Electronic Packaging and Modeling , 2008, 2008 10th Electronics Packaging Technology Conference.