Auger electron spectroscopy

Abstract Auger Electron Spectroscopy has recently emerged as one of the most sensitive methods of surface analysis and is becoming widely accepted due to the relative simplicity of the LEED-Auger and cylindrical mirror analyzers. There is thus a need for a review describing the underlying physical principles of the Auger process and containing a discussion of the type of information that can be obtained, comparisons with other related techniques, and a critical assessment of the instrumentation.

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