论文信息 - On the microstructure of Si coimplanted with H+ and He+ ions at moderate energies - 字舞流文

On the microstructure of Si coimplanted with H+ and He+ ions at moderate energies

N. Cherkashin | P. Fichtner | M. Beaufort | J. Barbot | S. Reboh | A. Déclemy | F. Schaurich