Monte Carlo simulation of multiple and plural scattering in elastic recoil detection

Abstract In heavy ion elastic recoil detection measurements, the multiple and plural scattering of in-going primary ions and out-coming recoiled atoms introduces a major problem for a reliable and accurate analysis of concentration distributions in samples. In this study, a Monte Carlo (MC) code including multiple and plural scattering has been developed for simulation of elastic recoil detection energy spectra. Simulated spectra are in a good agreement with experimental spectra. The influence of the multiple or plural scattering on the energy spectra is discussed. Applications of the MC approach in elastic recoil detection analysis are considered.

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