Silicon Millimeter-Wave Integrated Circuit Technology

A monolithic integrated circuit consists of a semiconductor single-crystal chip containing both active and passive elements and their interconnections. Since the invention of the integrated circuit in 1958 much progress has been made concerning packaging density, power consumption, speed and frequency performance. The concept of Microwave Integrated Circuits (MIC) was inaugurated in 1964. Prior to that nearly all microwave equipment utilized waveguide, coaxial or strip-line circuits. These systems have been costly, large and heavy. Especially for the millimeter-wave region (30–300 GHz) these systems became rather expensive due to the wavelength-determined small size and the necessary highly-precise machine tolerances.

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