Automatic testing of MMIC wafers

Microwave probes are used extensively for linear and nonlinear characterization of microwave devices on wafer and are commercially available for use at frequencies up to 65 GHz. An on-wafer noise measurement test system, for discrete devices, is now commercially available and on-wafer power measurement techniques are emerging slowly. These probes are also getting more recognition for the testing of packaged chips, packages, and modules. More accurate calibration techniques and their on-wafer validation are being developed. Automatic testing of MMIC wafers, using an integrated test system, is a key requirement for the development of low-cost IC production.

[1]  Mark J. W. Rodwell,et al.  Direct electro-optic sampling of GaAs integrated circuits , 1985 .

[2]  H.B. Sequeira,et al.  Improved Accuracy of On-Wafer Measurements Using the MMAVERIC Calibration Technique , 1989, 34th ARFTG Conference Digest.

[3]  David M. Bloom,et al.  Picosecond optical sampling of GaAs integrated circuits , 1988 .

[4]  R. L. Van Tuyl,et al.  A Manufacturing Process for Analog and Digital Gallium Arsenide Integrated Circuits , 1982 .

[5]  G. F. Engen,et al.  Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer , 1979 .

[6]  J Browne.  スプリアス信号を低減するダイレクト‐ディジタルRF周波数合成器(DDS) , 1989 .

[7]  Brian H. Kolner,et al.  Electrooptic Sampling of GaAs Integrated Circuits , 1986, Topical Meeting on Ultrafast Phenomena.

[8]  Gerard Mourou,et al.  Subpicosecond electrical sampling , 1983 .

[9]  David M. Bloom,et al.  Electro‐optic sampling of planar digital GaAs integrated circuits , 1985 .

[10]  R. Majidi-Ahy,et al.  100 GHz on-wafer S-parameter measurements by electrooptic sampling , 1989, IEEE MTT-S International Microwave Symposium Digest.

[11]  Andrew C. Davidson,et al.  Accuracy improvements in microwave noise parameter measurements , 1989 .

[12]  S. Rehnmark,et al.  On the Calibration Process of Automatic Network Analyzer Systems (Short Papers) , 1974 .

[13]  M.J.W. Rodwell,et al.  Internal Microwave Propagation and Distortion Characteristics of Travelling-Wave Amplifiers Studied by Electro-Optic Sampling , 1986, 1986 IEEE MTT-S International Microwave Symposium Digest.

[14]  Michael J. Howes,et al.  Improved calibration and measurement of the scattering parameters of microwave integrated circuits , 1989 .

[15]  R. Soares,et al.  A unified mathematical approach to two-port calibration techniques and some applications , 1989 .