반도체 스테이지용 복합모드 MR 마운트의 제어 성능 평가

This paper presents experimental performance evaluation of a coupled mode MR(magnetorheological) mount for semiconductor manufacturing stage. The vibration sources of semi-conductor manufacturing stage can be categorized into two types, the vibration from the floor and the transient vibration during manufacturing. In this research, the coupled mode MR mount, which can control the environment vibration from floor and the transient vibration is manufactured. In order that MR mount can be applied into semi-conductor manufacturing stage, the coupled mode MR mount should be evaluated. The damping force of MR mount are measured in various exiting frequency and the response time is measured by experiment. Consequently, the response time of MR mount is fast and the control range of damping force is large. But, a phase delay of damping force will have to be modified.