论文信息 - PID Controller Design for Nano Motion Actuator(Mechanical Systems) - 字舞流文

PID Controller Design for Nano Motion Actuator(Mechanical Systems)

Kazuhiko Hiramoto | Akihiro Naganawa | Shigeki Mori | Yotsugi Shibuya | Masato Furuya

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[2] Goro Obinata,et al. Finite element method analysis and control of micro actuator with piezoelectric element for spinstand , 2005 .