论文信息 - MBE-grown high κ gate dielectrics of HfO2 and (Hf-Al)O2 for Si and III-V semiconductors nano-electronics - 字舞流文

MBE-grown high κ gate dielectrics of HfO2 and (Hf-Al)O2 for Si and III-V semiconductors nano-electronics

Y. J. Lee | Y. D. Wu | S. Maikap | M. Tsai | J. Kwo | M. Hong | J. Mannaerts | P. Chang | Fu-Rong Chen | Shih-Yen Lin | Yi-Lin Huang | R. Lo | W. Hsieh | L. Lee | W. Lee | Y. Hsu | T. Gustffson