10 Gbit/s high sensitivity, low-voltage-operation avalanche photodiodes with thin InAlAs multiplication layer and waveguide structure

The development of waveguide avalanche photodiodes with a very thin 0.1 /spl mu/m multiplication layer for use in high-speed, high-sensitivity, low-voltage-operation receivers is presented. A /spl eta/=76% a GB product of 180 GHz. And a breakdown voltage Vb of 15 V were obtained. The 10 Gbit/s bit error rate measurement showed a sensitivity of -28 dBm (BER 10/sup -9/, PRBS 2/sup 23/-1), which is the highest sensitivity yet reported for APD receivers.