Design, modeling, and testing of a novel 6-DOF micropositioning stage with low profile and low parasitic motion

We developed a novel piezoelectrically actuated 6 degree-of-freedom (DOF) stage for micropositioning. To achieve a parallel mechanism with high stiffness, compact size, and low parasitic motion for 6-DOF positioning, an orthogonal actuator configuration is proposed and actuation units are carefully designed. For the purpose of suppressing parasitic motion in the overall stage, the ratios of the lateral stiffness to actuating directional stiffness of the actuation units are minimized under the condition that the stress at any point in the stage does not exceed the allowable strength. Flexure hinges and lever linkages are effectively applied to the horizontal and vertical actuation units. A physics-based model of the stage is developed to ensure low system order and high reliability. The model parameters are estimated by experiment and finite element analysis. Open-loop tests including sinusoidal and step responses verify low parasitic motion and reliability of the model. Closed-loop step responses with a model-based controller validate the high micropositioning performance of the stage.

[1]  Placid Mathew Ferreira,et al.  Design analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage , 2007 .

[2]  Walter D. Pilkey.  Peterson's Stress Concentration Factors , 1997 .

[3]  Akira Shimokohbe,et al.  A six-degrees of freedom fine motion mechanism , 1989 .

[4]  Musa Jouaneh,et al.  Modeling of flexure-hinge type lever mechanisms , 2003 .

[5]  Hwa Soo Kim,et al.  Active vibration control using a novel three-DOF precision micro-stage , 2010 .

[6]  Guilin Yang,et al.  Kinematic design of a family of 6-DOF partially decoupled parallel manipulators , 2009 .

[7]  Evangelos Papadopoulos,et al.  Model-based control of a 6-dof electrohydraulic Stewart–Gough platform , 2008 .

[8]  Frank Chongwoo Park,et al.  Eclipse II: a new parallel mechanism enabling continuous 360-degree spinning plus three-axis translational motions , 2001, IEEE Trans. Robotics Autom..

[9]  Musa Jouaneh,et al.  Design and characterization of a low-profile micropositioning stage , 1996 .

[10]  M. Kamlah,et al.  Ferroelectric and ferroelastic piezoceramics – modeling of electromechanical hysteresis phenomena , 2001 .

[11]  Jitendran Muthuswamy,et al.  A chronic micropositioning system for neurophysiology , 2002, Proceedings of the Second Joint 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society] [Engineering in Medicine and Biology.

[12]  Shuichi Dejima,et al.  Precision positioning of a five degree-of-freedom planar motion stage , 2005 .

[13]  Chia-Hsiang Menq,et al.  Modeling and control of a six-axis precision motion control stage , 2005 .

[14]  Mel J. Goodfriend,et al.  High-force high-strain wide-bandwidth linear actuator using the magnetostrictive material Terfenol-D , 1992, Other Conferences.

[15]  Tien-Fu Lu,et al.  Review of circular flexure hinge design equations and derivation of empirical formulations , 2008 .

[16]  P. Gao,et al.  A six-degree-of-freedom micro-manipulator based on piezoelectric translators , 1999 .

[17]  Ben-Zion Sandler,et al.  Rigid 6-DOF parallel platform for precision 3-D micromanipulation , 2001 .

[18]  Toru Tojo,et al.  Piezoelectrically driven XYθ table for submicron lithography systems , 1989 .

[19]  Martin L. Culpepper,et al.  Design of a six-axis micro-scale nanopositioner—μHexFlex , 2006 .

[20]  Won-Jong Kim,et al.  Extended Range Six-DOF High-Precision Positioner for Wafer Processing , 2006, IEEE/ASME Transactions on Mechatronics.

[21]  Etienne Burdet,et al.  Adaptive control of the Hexaglide, a 6 dof parallel manipulator , 1997, Proceedings of International Conference on Robotics and Automation.

[22]  S. Gwo,et al.  A new high‐resolution two‐dimensional micropositioning device for scanning probe microscopy applications , 1994 .