Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces
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Sang Chul Lee | Kee-Bong Choi | JaeJong Lee | Geehong Kim | Soongeun Kwon | Hyungjun Lim | Kee-Bong Choi | Geehong Kim | Hyungjun Lim | Soongeun Kwon | Jaejong Lee | Sang-Chul Lee
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