Annealing Reaction for Ni Silicidation of Si Nanowire

Silicidation of Si Nanowire (Si NW) has been investigated. In order to estimate the activation energy for Ni silicide of Si NW, the encroachment length of Ni silicide from the edge of exposed Si NW was measured by SEM images. The activation energy of Ni silicidation into 12nm x 17nm (110) Si NW was 0.95eV. Similarly, the activation energy of Ni silicidation into 8nm x 12nm (100) Si NW was 0.90eV. They are smaller than 1.23eV [1] which is the activation energy of Ni silicidation for (100) bulk S