Implementation of a CIM system for semiconductor manufacturing at Rochester Institute of Technology

A computer-integrated-manufacturing (CIM) system which has been installed at the Rochester Institute of Technology to support a student-run integrated-circuit factory is described. The hardware and software selected are described. The capabilities of the system are discussed. The status of the project, long-term goals, and additional educational activities are outlined.<<ETX>>

[1]  Lynn F. Fuller A university flexible technology foundry for VLSI application specific integrated circuits , 1989, Proceedings., Second Annual IEEE ASIC Seminar and Exhibit,.

[2]  D. T. Price,et al.  A student-run IC factory at RIT , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[3]  Lynn Fuller,et al.  A new program at RIT: master of engineering in microelectronics manufacturing engineering , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[4]  Lynn Fuller,et al.  Care and feeding of a university cleanroom facility , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.