论文信息 - Defects in 4H-SiC epilayers affecting device yield and reliability - 字舞流文

Defects in 4H-SiC epilayers affecting device yield and reliability

A. Agarwal | B. Odekirk | N. Mahadik | Woongje Sung | P. Bonanno | Jake Soto | R. Stahlbush