Fabrication of CNT nanosensors by combining micro-robotic spotting and DEP technologies

An automated carbon nanotubes (CNTs) microspotting system was developed for rapid and batch assembly of bulk multi-walled carbon nanotubes (MWNT) based nanosensors. By combining dielectrophoretic (DEP) and microspotting technique, MWNT bundles were successfully and repeatably manipulated between arrays of micro-fabricated electrodes. Preliminary experimental results showed that two different spotting methods were successful in forming CNTs between microelectrodes and the time required to form one CNT sensor was less than 1 second. This feasible batch manufacturable method dramatically reduces production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT and other nanowire based devices.

[1]  C. Hsu,et al.  Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory , 1993 .

[2]  Seiji Akita,et al.  Orientation of Carbon Nanotubes Using Electrophoresis , 1996 .

[3]  Jiangtao Hu,et al.  Controlled growth and electrical properties of heterojunctions of carbon nanotubes and silicon nanowires , 1999, Nature.

[4]  R. Krupke,et al.  Separation of Metallic from Semiconducting Single-Walled Carbon Nanotubes , 2003, Science.

[5]  Wen J. Li,et al.  Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[6]  S. Iijima.  Helical microtubules of graphitic carbon , 1991, Nature.

[7]  King Wai Chiu Lai,et al.  KL probes for robotic-based cellular nano surgery , 2003, 2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003..

[8]  Charles M. Lieber,et al.  Directed assembly of one-dimensional nanostructures into functional networks. , 2001, Science.

[9]  Zhong Lin Wang,et al.  Carbon nanotube quantum resistors , 1998, Science.

[10]  Wahyu Setyawan,et al.  Nanotube electronics: Large-scale assembly of carbon nanotubes , 2003, Nature.

[11]  Drew Myers,et al.  Surfaces, interfaces, and colloids , 1991 .

[12]  R. Smalley,et al.  Magnetically aligned single wall carbon nanotube films: preferred orientation and anisotropic transport properties , 2003 .

[13]  Seiji Akita,et al.  RAPID COMMUNICATION: Orientation and purification of carbon nanotubes using ac electrophoresis , 1998 .

[14]  W.J. Li,et al.  Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors , 2004, IEEE Transactions on Nanotechnology.

[15]  P. Ajayan,et al.  Microfabrication technology: Organized assembly of carbon nanotubes , 2002, Nature.

[16]  Charles M. Lieber,et al.  Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes , 1997 .

[17]  K. Ishibashi,et al.  Nanostructure construction in single-walled carbon nanotubes by AFM manipulation , 2001, Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).

[18]  Tarek El-Aguizy,et al.  Large-Scale Assembly of Carbon Nanotubes , 2004 .

[19]  Rosa H. M. Chan,et al.  Rapid assembly of carbon nanotubes for nanosensing by dielectrophoretic force , 2004 .