Pre-heating apparatus for using semiconductor device handler system

PURPOSE: A pre-heating apparatus of a handler system of a semiconductor device is provided to remarkably shorten an interval of time taken to load, pre-heat and unload the semiconductor device and to simplify the structure of a pick-up unit necessary for loading/unloading the semiconductor device. CONSTITUTION: A tray loader includes a tray receiving the semiconductor device, installed in a base plate(100). Test equipment receives the semiconductor device and performs a test regarding the semiconductor device. A pre-heater unit pre-heats the semiconductor device and transfers the semiconductor device from the tray loader to the test equipment. A height variation is generated by a variation generation unit in the first pre-heater block(330) while the semiconductor device is transferred from the tray loader to the test equipment. The second pre-heater block(340) is transferred from the test equipment to the tray loader without a height variation, crossing the first pre-heater unit where the height variation is generated. A pre-heater block drive unit(370) makes the first and second pre-heater units have the same transfer rate and opposite transfer directions.