论文信息 - Plasma boundary sheath in the afterglow of a pulsed inductively coupled RF plasma - 字舞流文

Plasma boundary sheath in the afterglow of a pulsed inductively coupled RF plasma

U. Czarnetzki | M. Turner | B. Heil | T. Schwarz-Selinger | Z. Petrović | T. Gans | M. Osiac | D. O’Connell