Efficient computation of interconnect capacitances using the domain decomposition approach

In this paper, we present a novel technique for efficient computation of capacitance matrices of complex interconnect configurations. It applies the finite difference (FD) method in conjunction with the perfectly matched layer (PML) and impedance boundary condition for mesh truncation, and combines these with the overlapping domain decomposition approach to handle complex configurations that are too large to handle in one step. Convergence and efficiency issues of the proposed algorithm are examined and numerical examples are presented to illustrate the usefulness of the proposed scheme.