Towards Model Order Selection in View of Robust Control for Motion Systems with Dominant Flexible Dynamics

Next-generation high-precision positioning systems tend to become lightweight. Generally, lightweight systems exhibit pronounced flexible dynamical behavior in relevant frequency ranges. These flexible dynamics typically are not aligned with the motion degrees-of-freedom, leading to an inherently multivariable dynamical behavior. As a consequence, multivariable controllers are essential to achieve the limits of performance. Model-based control enables a systematic design of such multivariable controllers.