Polarity inversion in aluminum nitride thin films under high sputtering power
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Nobuaki Kawahara | Morito Akiyama | Akihiko Teshigahara | Kazuhiko Kano | Naohiro Ueno | Michiru Sakamoto | Toshihiro Kamohara | N. Ueno | A. Teshigahara | M. Sakamoto | M. Akiyama | T. Kamohara | K. Kano | N. Kawahara
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