论文信息 - 27.4: Modeling and Fabrication of Organic Vapor Phase Deposition (OVPD) Equipment for OLED Display Manufacturing

27.4: Modeling and Fabrication of Organic Vapor Phase Deposition (OVPD) Equipment for OLED Display Manufacturing

The Principle of Organic Vapor Phase Deposition (OVPD) using AIXTRON's proprietary Close Coupled Showerhead technology will be presented and discussed. This alternative deposition technology enables substrate scalability and multiple layer deposition with high growth rates and high material efficiency. CFD‐Simulations for the temperature distribution and the mass fraction of typically used Alq3 reveal excellent process control required for homogeneous deposition and reproducible mass production. The actual production equipment will be discussed.

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