A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining
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H. Fujita | K. Kato | H. Toshiyoshi | A. Morosawa | H. Toshiyoshi | A. Morosawa | C. Chong | K. Isamoto | K. Isamoto | Changho Chong | Kazuya Kato | Hiroyuki Fujita
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