论文信息 - Transport-based dopant mapping in advanced FinFETs - 字舞流文

Transport-based dopant mapping in advanced FinFETs

Gerhard Klimeck | Nadine Collaert | Serge Biesemans | Sven Rogge | Cameron J. Wellard | Lloyd C. L. Hollenberg | Rajib Rahman | G. P. Lansbergen | J. Caro