Noncontact sensor structure interface

A non-contact passive inductive interface to any type of capacitive sensor structure is presented in the paper. The interface performance is based on the magnetic coupling between two planar coils where one is located on the sensor die and the other is the pat of measurement circuit. The interface construction ins very simple in fabrication and reliable in operation. The theoretical calculations, metrological parameters analysis as well as a sensitivity on the interface parameters variation are discussed in the report.