System positioning error compensated by local scan in atomic force microscope based nanomanipulation

Atomic force microscopy (AFM) has been used as a nanomanipulation tool for a decade taking advantage of its high precision and resolution. But due to thermal drift, nonlinear and hysteresis of piezo scanner, a lot of spatial uncertainties associates with the motion of AFM tip, which makes it difficult to move the tip to a desired position accurately. A lot of work has been carried out to improve the positioning accuracy of AFM tip. But most of them only compensate the positioning error in horizontal space, seldom paper pays attention to the vertical positioning error caused by the system structure. To enhance the positioning precision in 3-D space, this paper mainly addresses what causes the position error in vertical direction and how to on-line compensates it. It reveals that when the tip is mounted with an offset to the tube axis, the bow-effect of the piezo scanners will increase the position error seriously. In addition, a local scan based method is proposed to compensate this error. The experimental results are presented to demonstrate the effectiveness of the proposed method.

[1]  L. Howald,et al.  Sled-Type Motion on the Nanometer Scale: Determination of Dissipation and Cohesive Energies of C60 , 1994, Science.

[2]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[3]  Hanmin Shi,et al.  A circular arc bending model of piezoelectric tube scanners , 1996 .

[4]  L. Samuelson,et al.  Controlled manipulation of nanoparticles with an atomic force microscope , 1995 .

[5]  Charles M. Lieber,et al.  Machining Oxide Thin Films with an Atomic Force Microscope: Pattern and Object Formation on the Nanometer Scale , 1992, Science.

[6]  John T. Woodward,et al.  Removing drift from scanning probe microscope images of periodic samples , 1998 .

[7]  Ning Xi,et al.  Augmented reality system for real-time nanomanipulation , 2003, 2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003..

[8]  Claudio Nicolini,et al.  Drift elimination in the calibration of scanning probe microscopes , 1995 .

[9]  Kang L. Wang,et al.  NANOFABRICATION OF THIN CHROMIUM FILM DEPOSITED ON SI(100) SURFACES BY TIP INDUCED ANODIZATION IN ATOMIC FORCE MICROSCOPY , 1995 .

[10]  Stefan Thalhammer,et al.  The AFM as a tool for chromosomal dissection – the influence of physical parameters , 1998 .

[11]  U.C. Wejinya,et al.  Adaptable End Effector for Atomic Force Microscopy Based Nanomanipulation , 2006, IEEE Transactions on Nanotechnology.

[12]  Ronald P. Andres,et al.  Fabrication of two‐dimensional arrays of nanometer‐size clusters with the atomic force microscope , 1995 .

[13]  Aristides A. G. Requicha,et al.  Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation , 2008, IEEE Transactions on Automation Science and Engineering.

[14]  Aristides A. G. Requicha,et al.  Drift compensation for automatic nanomanipulation with scanning probe microscopes , 2006, IEEE Transactions on Automation Science and Engineering.

[15]  Ning Xi,et al.  3D nanomanipulation using atomic force microscopy , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[16]  Lianqing Liu,et al.  On-line sensing and display in Atomic Force Microscope based nanorobotic manipulation , 2007, 2007 IEEE/ASME international conference on advanced intelligent mechatronics.