Collecting system for ultraviolet photoetching light source of discharging Z pinch of capillary tube

The invention provides a collecting system for an ultraviolet photoetching light source of a discharging Z pinch of a capillary tube and relates to a 13.5nm pole ultraviolet photoetching light source of the discharging Z pinch of the capillary tube. The invention aims to solve the problems of poor far-field uniformity and low reflectivity of the collecting system composed of multiple layers of ellipsoid reflectors. A WolterI type collecting system is adopted for realizing. The collecting system comprises N layers of drum-shaped reflectors, wherein the reflectors are coaxially nested in turn; each layer of reflector is formed by connecting a rotating ellipsoid surface with a rotating double-curved surface; the rotating ellipsoid surface and the rotating double-curved surface have a common geometric focus; the geometric focuses of multiple layers of reflectors are coincided with each other; the curve intercepted from the plane of a central axis on the inner surface of the rotating ellipsoid surface of each reflector meets the equation as shown in the specification; the curve intercepted from the plane of the central axis on the inner surface of the rotating double-curved surface meets the equation as shown in the specification. The collecting system has the improved far-field uniformity and reflectivity and is applied to the collection of ultraviolet light.