Multiple Imaging Using Two 1-D Phase Gratings With Uniformly Diffracted Spots

Optical system that can produce multiple images of an object are specially useful for the microelectronics industry. It may replace costly and time-consuming step and repeat cameras. For this kind of optical system, the major problems are in achieving a high resolving power in images that can be a large size while keeping the distortion less than 2 %. Meanwhile, the positions of the multiple images in the array must be within submicron tolerances.