Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD
暂无分享,去创建一个
[1] E. Bonnotte,et al. Silicon-based integrated interferometer with phase modulation driven by surface acoustic waves. , 1997, Optics letters.
[2] Hisaaki Tobushi,et al. Analysis of the mechanical behavior of shape memory polymer membranes by nanoindentation, bulging and point membrane deflection tests , 2000 .
[3] Glenn Beheim,et al. Modern trends in microstructures and integrated optics for communication, sensing, and actuation , 1997 .
[4] Christophe Gorecki,et al. Characterization of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapor deposition: applications in integrated optics , 2001, International Symposium on Photonics and Applications.