Impact of deposition temperature on microstructure and properties of erbium oxide antireflective films deposited on CVD diamond substrates

[1]  Abhishek Rakshit,et al.  Effect of oxygen content and crystallization temperature on the insulator-to-metal transition properties of vanadium oxide thin-films , 2020 .

[2]  Jun Xu,et al.  Investigation of temperature-dependent ferroelectric properties of Y-doped HfO2 thin film prepared by medium-frequency reactive magnetron co-sputtering , 2020, Vacuum.

[3]  Xin Jia,et al.  Microstructure, hardness and optical properties of Er2O3 films deposited on diamond-coated and Si(100) substrates by radio frequency magnetron sputtering , 2020 .

[4]  X. Portier,et al.  Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition , 2020 .

[5]  Xiaodong Zhu,et al.  Effect of deposition temperature on hydrophobic CrN/AlTiN nanolaminate composites deposited by Multi-Arc-Ion Plating , 2019, Journal of Alloys and Compounds.

[6]  L. Hultman,et al.  Reliable determination of chemical state in x-ray photoelectron spectroscopy based on sample-work-function referencing to adventitious carbon: Resolving the myth of apparent constant binding energy of the C 1s peak , 2018, Applied Surface Science.

[7]  T. Muroga,et al.  Microstructure and peeling behavior of MOCVD processed oxide insulator coating before and after ion beam irradiation , 2018, Nuclear Materials and Energy.

[8]  Z. Yao,et al.  Effects of post-deposition annealing on the chemical composition, microstructure, optical and mechanical properties of Y2O3 film , 2018, Surface and Coatings Technology.

[9]  S. Kaya,et al.  Modifications of structural, chemical, and electrical characteristics of Er 2 O 3 /Si interface under Co-60 gamma irradiation , 2018 .

[10]  A. Torres-Huerta,et al.  Optical properties of nanocrystalline La 2 O 3 dielectric films deposited by radio frequency magnetron sputtering , 2017 .

[11]  L. Hultman,et al.  C 1s Peak of Adventitious Carbon Aligns to the Vacuum Level: Dire Consequences for Material's Bonding Assignment by Photoelectron Spectroscopy , 2017, Chemphyschem : a European journal of chemical physics and physical chemistry.

[12]  Dae Won Cho,et al.  Synthesis and characterization of Er2O3 nanorods and nanosheets , 2017 .

[13]  A. Neville,et al.  Tribological performance of an H-DLC coating prepared by PECVD , 2016 .

[14]  Xiongbo Yan,et al.  Characterization and thermal shock behavior of Y2O3 films deposited on freestanding CVD diamond substrates , 2016 .

[15]  Yanming Ma,et al.  Nanotwinned diamond with unprecedented hardness and stability , 2014, Nature.

[16]  D. Hurley,et al.  Grain growth and mechanical properties of CeO2-x films deposited on Si(100) substrates by pulsed dc magnetron sputtering , 2013 .

[17]  Pei Lei,et al.  Yttrium oxide thin films prepared under different oxygen-content atmospheres: microstructure and optical properties , 2012 .

[18]  C. Powell.  Recommended Auger parameters for 42 elemental solids , 2012 .

[19]  Jiecai Han,et al.  Growth and characterization of yttrium oxide films by reactive magnetron sputtering , 2011 .

[20]  X. Ma,et al.  Structural and microstructural analyses of crystalline Er(2)O(3) high-k films grown on Si (001) by laser molecular beam epitaxy , 2011 .

[21]  V. V. Atuchin,et al.  Enhanced optical constants of nanocrystalline yttrium oxide thin films , 2011 .

[22]  T. Muroga,et al.  Microstructure control and deuterium permeability of erbium oxide coating on ferritic/martensitic steels by metal-organic decomposition , 2010 .

[23]  T. Płociński,et al.  Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition , 2009 .

[24]  M. Saunders,et al.  Er2O3 as a high-K dielectric candidate , 2007 .

[25]  J. P. Hayes,et al.  Morphology, microstructure, and residual stress in EBPVD erbia coatings , 2007 .

[26]  M. Al-Kuhaili,et al.  Optical properties of erbium oxide thin films deposited by electron beam evaporation , 2007 .

[27]  F. Priolo,et al.  Optical and structural properties of Er2O3 films grown by magnetron sputtering , 2006 .

[28]  J. Zou,et al.  Superior electrical properties of crystalline Er2O3 films epitaxially grown on Si substrates , 2006 .

[29]  F. Xue,et al.  Epitaxial growth of ErO films on Si(001) , 2005 .

[30]  S. Achour,et al.  Study of Erbium Oxidation by XPS and UPS , 2005 .

[31]  T. Muroga,et al.  Chemical formation of erbium oxide layer on V–4Cr–4Ti during exposure to liquid lithium doped with erbium , 2004 .

[32]  M. Hefetz,et al.  Effect of grain size on elastic modulus and hardness of nanocrystalline ZrO2-3 wt% Y2O3 ceramic , 2004 .

[33]  G. C. Chen,et al.  Oxidation behaviour of high quality freestanding diamond films by high power arcjet operating at gas recycling mode , 2004 .

[34]  F. Capasso,et al.  Quantum devices, MBE technology for the 21st century , 2001 .

[35]  T. Mollart,et al.  Transition metal oxide anti-reflection coatings for airborne diamond optics , 2001 .

[36]  K. Wandelt,et al.  The interaction of oxygen with gadolinium: UPS and XPS studies , 1985 .

[37]  L. Hultman,et al.  X-ray photoelectron spectroscopy: Towards reliable binding energy referencing , 2020, Progress in Materials Science.

[38]  H. Weber,et al.  UV laser polishing of thick diamond films for IR windows , 1999 .