Growth Mechanisms and Electronic Properties of Vertically Aligned MoS2

Thin films of layered semiconductors emerge as highly promising materials for energy harvesting and storage, optoelectronics and catalysis. Their natural propensity to grow as oriented crystals and films is one of their distinct properties under recent focal interest. Specifically, the reaction of transition metal films with chalcogen vapor can result in films of vertically aligned (VA) layers, while metal-oxides react with chalcogens in vapor phase to produce horizontally aligned crystals and films. The growth mechanisms of vertically oriented films are not yet fully understood, as well as their dependence on the initial metal film thickness and growth conditions. Moreover, the resulting electronic properties and the role of defects and disorder had not yet been studied, despite their critical influence on catalytic and device performance. In this work, we study the details of oriented growth of MoS2 with complementary theoretical and experimental approaches. We present a general theoretical model of diffusion-reaction growth that can be applied to a large variety of layered materials synthesized by solid-vapor reaction. Moreover, we inspect the relation of electronic properties to the structure of vertically aligned MoS2 and shed light on the density and character of defects in this material. Our measurements on Si-MoS2 p-n hetero-junction devices point to the existence of polarizable defects that impact applications of vertical transition-metal dichalcogenide materials.

[1]  Xiaochi Liu,et al.  Effects of plasma treatment on surface properties of ultrathin layered MoS2 , 2016 .

[2]  Haotian Wang,et al.  Electrochemical tuning of vertically aligned MoS2 nanofilms and its application in improving hydrogen evolution reaction , 2013, Proceedings of the National Academy of Sciences.

[3]  Yeonwoong Jung,et al.  Metal seed layer thickness-induced transition from vertical to horizontal growth of MoS2 and WS2. , 2014, Nano letters.

[4]  A. Radenović,et al.  Single-layer MoS2 transistors. , 2011, Nature nanotechnology.

[5]  P. Bertrand Orientation of rf-sputter-deposited MoS_2 films , 1989 .

[6]  B. Radisavljevic,et al.  Mobility engineering and a metal-insulator transition in monolayer MoS₂. , 2013, Nature materials.

[7]  Bandgap and doping effects in MoS2 measured by Scanning Tunneling Microscopy and Spectroscopy , 2014, 1405.2367.

[8]  Jr-hau He,et al.  Epitaxial growth of a monolayer WSe2-MoS2 lateral p-n junction with an atomically sharp interface , 2015, Science.

[9]  P. L. McEuen,et al.  The valley Hall effect in MoS2 transistors , 2014, Science.

[10]  Jun Wang,et al.  Direct synthesis of large-scale hierarchical MoS2 films nanostructured with orthogonally oriented vertically and horizontally aligned layers. , 2016, Nanoscale.

[11]  Sefaattin Tongay,et al.  Ultrafast charge transfer in atomically thin MoS₂/WS₂ heterostructures. , 2014, Nature nanotechnology.

[12]  Jun Lou,et al.  Vertical and in-plane heterostructures from WS2/MoS2 monolayers. , 2014, Nature materials.

[13]  R. Wallace,et al.  A kinetic Monte Carlo simulation method of van der Waals epitaxy for atomistic nucleation-growth processes of transition metal dichalcogenides , 2017, Scientific Reports.

[14]  R. Wallace,et al.  First principles kinetic Monte Carlo study on the growth patterns of WSe2 monolayer , 2016 .

[15]  P. Ajayan,et al.  Large Area Vapor Phase Growth and Characterization of MoS2 Atomic Layers on SiO2 Substrate , 2011, 1111.5072.

[16]  X. Duan,et al.  Electroluminescence and Photocurrent Generation from Atomically Sharp WSe2/MoS2 Heterojunction p–n Diodes , 2014, Nano letters.

[17]  D. Chadi,et al.  MICROSCOPIC STUDY OF OXYGEN-VACANCY DEFECTS IN FERROELECTRIC PEROVSKITES , 1998 .

[18]  D. Wouters,et al.  Voltage shift and deformation in the hysteresis loop of Pb(Zr,Ti)O3 thin film by defects , 1996 .

[19]  Samaresh Das,et al.  High-Speed Scalable Silicon-MoS2 P-N Heterojunction Photodetectors , 2017, Scientific Reports.

[20]  Wang Yao,et al.  Spin and pseudospins in layered transition metal dichalcogenides , 2014, Nature Physics.

[21]  S. Meloni,et al.  Ionic polarization-induced current–voltage hysteresis in CH3NH3PbX3 perovskite solar cells , 2016, Nature Communications.

[22]  Yan Zhang,et al.  In Situ Fabrication of Vertical Multilayered MoS2/Si Homotype Heterojunction for High-Speed Visible-Near-Infrared Photodetectors. , 2016, Small.

[23]  F. Lévy,et al.  Morphological and compositional properties of MoSe2 films prepared by r.f. magnetron sputtering , 1984 .

[24]  Z. Shen,et al.  Pseudocapacitive Na-Ion Storage Boosts High Rate and Areal Capacity of Self-Branched 2D Layered Metal Chalcogenide Nanoarrays. , 2016, ACS nano.

[25]  C. V. Singh,et al.  Vertically Oriented Arrays of ReS2 Nanosheets for Electrochemical Energy Storage and Electrocatalysis. , 2016, Nano letters.

[26]  G. Fitzgerald,et al.  'I. , 2019, Australian journal of primary health.

[27]  Xiaodong Xu,et al.  Vapor-solid growth of high optical quality MoS₂ monolayers with near-unity valley polarization. , 2013, ACS nano.

[28]  L. Lauhon,et al.  Emerging device applications for semiconducting two-dimensional transition metal dichalcogenides. , 2014, ACS nano.

[29]  J. Westwater,et al.  The Mathematics of Diffusion. , 1957 .

[30]  Lain‐Jong Li,et al.  Synthesis of Large‐Area MoS2 Atomic Layers with Chemical Vapor Deposition , 2012, Advanced materials.

[31]  D. Naveh,et al.  On the impact of Vertical Alignment of MoS2 for Efficient Lithium Storage , 2017, Scientific Reports.

[32]  Yongqiang Yu,et al.  Ultrafast, Broadband Photodetector Based on MoSe2/Silicon Heterojunction with Vertically Standing Layered Structure Using Graphene as Transparent Electrode , 2016, Advanced science.

[33]  Wei Yu,et al.  Large Lateral Photovoltage Observed in MoS2 Thickness-Modulated ITO/MoS2/p-Si Heterojunctions. , 2017, ACS applied materials & interfaces.

[34]  I. Raevski,et al.  Study of intrinsic point defects in oxides of the perovskite family: I. Theory , 1996 .

[35]  Desheng Kong,et al.  Synthesis of MoS2 and MoSe2 films with vertically aligned layers. , 2013, Nano letters.

[36]  Liying Jiao,et al.  Controlled synthesis of highly crystalline MoS2 flakes by chemical vapor deposition. , 2013, Journal of the American Chemical Society.

[37]  Jung Ho Yu,et al.  Vertical heterostructure of two-dimensional MoS₂ and WSe₂ with vertically aligned layers. , 2015, Nano letters.

[38]  Madan Dubey,et al.  Electrical performance of monolayer MoS2 field-effect transistors prepared by chemical vapor deposition , 2013 .

[39]  Zi-kui Liu,et al.  Lateral Versus Vertical Growth of Two-Dimensional Layered Transition-Metal Dichalcogenides: Thermodynamic Insight into MoS2. , 2016, Nano letters.

[40]  Branimir Radisavljevic,et al.  Integrated circuits and logic operations based on single-layer MoS2. , 2011, ACS nano.

[41]  Jing Guo,et al.  Dual-gated MoS2/WSe2 van der Waals tunnel diodes and transistors. , 2015, ACS nano.

[42]  Y. Jung,et al.  Controlled Doping of Vacancy-Containing Few-Layer MoS2 via Highly Stable Thiol-Based Molecular Chemisorption. , 2015, ACS nano.

[43]  Jiansheng Jie,et al.  MoS2/Si Heterojunction with Vertically Standing Layered Structure for Ultrafast, High‐Detectivity, Self‐Driven Visible–Near Infrared Photodetectors , 2015 .

[44]  J. Warner,et al.  Generalized Mechanistic Model for the Chemical Vapor Deposition of 2D Transition Metal Dichalcogenide Monolayers. , 2016, ACS nano.

[45]  J. Kong,et al.  Integrated circuits based on bilayer MoS₂ transistors. , 2012, Nano letters.

[46]  Jing Kong,et al.  Intrinsic structural defects in monolayer molybdenum disulfide. , 2013, Nano letters.

[47]  E. Pop,et al.  Kinetic Study of Hydrogen Evolution Reaction over Strained MoS2 with Sulfur Vacancies Using Scanning Electrochemical Microscopy. , 2016, Journal of the American Chemical Society.

[48]  Li-Min Wang,et al.  Bandgap, mid-gap states, and gating effects in MoS2. , 2014, Nano letters.

[49]  Jun Yuan,et al.  Capture the growth kinetics of CVD growth of two-dimensional MoS2 , 2016, npj 2D Materials and Applications.

[50]  Sefaattin Tongay,et al.  Tuning interlayer coupling in large-area heterostructures with CVD-grown MoS2 and WS2 monolayers. , 2014, Nano letters.