论文信息 - Strain evolution and dopant activation in P-lmplanted metastable pseudomorphic Si(100)/Ge0.12Si0.88 - 字舞流文

Strain evolution and dopant activation in P-lmplanted metastable pseudomorphic Si(100)/Ge0.12Si0.88

N. D. Theodore | M. Nicolet | F. Eisen | J. H. Song | D. Lie | N. Theodore | D. Lie | J. H. Song | M.-A. Nicolet